In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh's method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate ...

This paper reports a new approach to the fabrication of 3D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. The fabrication process has been applied to a 1 mm × 2 mm × 1.2 μm diaphragm designed for a biomimetic directional microphone. The membrane has two 200 μm × 380 μm × 20 μm silicon proof m...

In this work, a beat-frequency encoded fiber laser hydrophone is developed for high-resolution acoustic detection by using an elastic corrugated diaphragm. The diaphragm is center-supported by the fiber. Incident acoustic waves deform the diaphragm and induce a concentrated lateral load on the laser cavity. The acoustically induced perturbation changes local optical phases and frequency-modulat...

Slow-wave instability in a rectangularly corrugated cylindrical waveguide is analyzed. Fields inside corrugation is expressed by a sum of space harmonics satisfying the boundary conditions at the corrugation wall. The corrugation fields are matched to periodic fields outside the corrugation at the boundary of the two regions. Infinitesimally thin annular electron beam is considered including th...

Radial elastic corrugation of multiwalled carbon nanotubes under hydrostatic pressure is demonstrated by using the continuum elastic theory. Various corrugation patterns are observed under a pressure of several GPa, wherein the stable cross-sectional shape depends on the innermost tube diameter D and the total number N of concentric walls. A phase diagram is established to obtain the requisite ...

Two-dimensional Au islands of different thicknesses grown on graphene/Ru(0001) were used to study the corrugation of the moire ́ structure of graphene/Ru(0001) and discriminate between its mainly structural or electronic character. A comparison of the apparent corrugation measured by scanning tunneling microscopy (STM) for different Au thicknesses with results of elasticity theory equations appl...

Wear-type rail corrugation is a significant problem in the railway transport industry. Some recent work has suggested that speed control can be used as an effective tool to minimize the rate of corrugation growth. This has brought about the need to model corrugation growth under variable passing speed. Variable speed rail corrugation growth modelling normally consists of either numerical simula...

Graphene is a two-dimensional material which has attracted the attention of many scientists over the past few years. To use graphene for electronic applications it should be placed on a substrate. The surface of any substrate has always a degree of corrugation. Substrate surface corrugation affects the surface morphology which in turn modulates the electronic properties of devices placed on suc...

This paper deals with the scattering of a TM plane wave from a perfectly conductive sinusoidal surface with finite extent. For comparison, however, we briefly discuss the diffraction by the sinusoidal surface with infinite extent, where we use the concept of the total diffraction cross section per unit surface introduced previously. To solve a case where the sinusoidal corrugation width is much...